Kumar, Praveen; Kumar, Mahesh; Noetzel, R.; Shivaprasad, S. M.
(Elsevier Science Sa, 2014)
We present the surface modification of Si(111) into silicon nitride by exposure to energetic N-2(+) ions. In-situ UHV experiments have been performed to optimize the energy and fluence of the N-2(+) ions to form silicon ...