Browsing Research Articles (Shivaprasad, S. M.) by Subject "Buffer Layer"

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Nitrogen ion induced nitridation of Si(111) surface: Energy and fluence dependence

Kumar, Praveen; Kumar, Mahesh; Noetzel, R.; Shivaprasad, S. M. (Elsevier Science Sa, 2014)

We present the surface modification of Si(111) into silicon nitride by exposure to energetic N-2(+) ions. In-situ UHV experiments have been performed to optimize the energy and fluence of the N-2(+) ions to form silicon ...
Optimization of energy and fluence of N-2(+) ions in the conversion of Al2O3 surface into AIN at room temperature

Kumar, Praveen; Devi, Pooja; Kumar, Mahesh; Shivaprasad, S. M. (Elsevier Science Bv, 2016)

The work presents a systematic study of energetic N-2(+) ion interaction with the clean Al2O3 surface at room temperature. Energetic N-2(+) ions with energies ranging from 0.1 to 5 keV were bombarded onto the c-plane Al2O3 ...

Now showing items 1-2 of 2

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